Invention Grant
- Patent Title: Photoresist stripping solution and a method of stripping photoresists using the same
- Patent Title (中): 光阻剥离溶液和使用其剥离光致抗蚀剂的方法
-
Application No.: US11898174Application Date: 2007-09-10
-
Publication No.: US08192923B2Publication Date: 2012-06-05
- Inventor: Shigeru Yokoi , Kazumasa Wakiya
- Applicant: Shigeru Yokoi , Kazumasa Wakiya
- Applicant Address: JP Kanagawa-Ken
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kanagawa-Ken
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2001-235884 20010803; JP2001-392290 20011225
- Main IPC: G03C11/12
- IPC: G03C11/12

Abstract:
A photoresist stripping solution which comprises (a) a salt of hydrofluoric acid with a base free from metal ions, (b) a water-soluble organic solvent, (c) a mercapto group containing corrosion inhibitor, and (d) water, and a method of stripping photoresists with the use of the same are disclosed. In case of using ammonium fluoride as component (a), the photoresist stripping solution may further contain (e) a salt of hydrofluoric acid with a quaternary ammonium hydroxide, such as tetramethylammonium hydroxide, tetrapropylammonium hydroxide, etc., and/or an alkanolamine. The photoresist stripping solution of the present invention has an excellent effect of protecting both Al- and Cu-based metal wiring conductors from corrosion, of efficiently stripping photoresist films and post-ashing residues, and is free from the precipitation of the corrosion inhibitor.
Public/Granted literature
- US20080011714A1 Photoresist stripping solution and a method of stripping photoresists using the same Public/Granted day:2008-01-17
Information query