Invention Grant
- Patent Title: Flash memory device and method of manufacturing the same
- Patent Title (中): 闪存装置及其制造方法
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Application No.: US12641410Application Date: 2009-12-18
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Publication No.: US08193052B2Publication Date: 2012-06-05
- Inventor: Sung Kun Park
- Applicant: Sung Kun Park
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: KR10-2008-0138873 20081231
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Disclosed is a flash memory device and a method of manufacturing the same. The flash memory device includes a floating gate formed on a semiconductor substrate, a select gate self-aligned on one sidewall of the floating gate, and an ONO pattern interposed between the floating gate and the select gate. A self-aligned split gate structure is formed for an EEPROM tunnel oxide cell flash memory device employing a split gate structure, so that a cell current is constant and the erasing characteristic between cells is uniform, thereby improving the reliability.
Public/Granted literature
- US20100163960A1 FLASH MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-07-01
Information query
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