Invention Grant
US08193057B2 MOS transistor for reducing short-channel effects and its production 有权
MOS晶体管,用于减少短沟道效应及其生产

  • Patent Title: MOS transistor for reducing short-channel effects and its production
  • Patent Title (中): MOS晶体管,用于减少短沟道效应及其生产
  • Application No.: US12946162
    Application Date: 2010-11-15
  • Publication No.: US08193057B2
    Publication Date: 2012-06-05
  • Inventor: Xiaoxu Kang
  • Applicant: Xiaoxu Kang
  • Applicant Address: CN Shanghai
  • Assignee: Shanghai IC R&D Center
  • Current Assignee: Shanghai IC R&D Center
  • Current Assignee Address: CN Shanghai
  • Agent Wenye Tan
  • Priority: CN200710039186 20070406
  • Main IPC: H01L21/336
  • IPC: H01L21/336
MOS transistor for reducing short-channel effects and its production
Abstract:
The invention is related to a MOS transistor and its fabrication method to reduce short-channel effects. Existing process has the problem of high complexity and high cost to reduce short-channel effects by using epitaxial technique to produce an elevated source and drain structure. In the invention, the MOS transistor, fabricated on a silicon substrate after an isolation module is finished, includes a gate stack, a gate sidewall spacer, and source and drain areas. The silicon substrate has a groove and the gate stack is formed in the groove. And the process for the MOS transistor includes the following steps: forming the groove; carrying out well implantation, anti-punchthrough implantation and threshold-voltage adjustment implantation; forming the gate stack in the groove which comprising patterning the gate electrode; carrying lightly doped drain implantation and halo implantation; forming the gate sidewall spacer; carrying source and drain implantation to get the source and drain areas; forming a metal silicide layer on the source and drain areas.
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