Invention Grant
- Patent Title: Bit line structure and method for the production thereof
- Patent Title (中): 位线结构及其制造方法
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Application No.: US12695277Application Date: 2010-01-28
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Publication No.: US08193059B2Publication Date: 2012-06-05
- Inventor: Ronald Kakoschke , Franz Schuler , Georg Tempel
- Applicant: Ronald Kakoschke , Franz Schuler , Georg Tempel
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Priority: DE10321739 20030514
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A bit line structure and associated fabrication method are provided for a semiconductor element or circuit arrangement. The bit line structure contains a surface bit line and a buried bit line. The buried bit line is formed in an upper section of a trench and is connected to an associated first doping region via a first connection layer. A first trench filling layer, which is insulated from the buried bit line by a second trench insulating layer, is situated in a lower section of the trench.
Public/Granted literature
- US20100129972A1 BIT LINE STRUCTURE AND METHOD FOR THE PRODUCTION THEREOF Public/Granted day:2010-05-27
Information query
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