Conductive via plug formation

Invention Grant

US08193089B2 Conductive via plug formation 有权

Title translation: 通过插塞形成导电

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Patent Title: Conductive via plug formation
Patent Title (中): 通过插塞形成导电
Application No.: US12502220

Application Date: 2009-07-13
Publication No.: US08193089B2

Publication Date: 2012-06-05
Inventor: Antoine Khoueir , Yongchul Ahn , Peter Nicholas Manos , Shuiyan Huang , Ivan Petrov Ivanov
Applicant: Antoine Khoueir , Yongchul Ahn , Peter Nicholas Manos , Shuiyan Huang , Ivan Petrov Ivanov
Applicant Address: US CA Scotts Valley
Assignee: Seagate Technology LLC
Current Assignee: Seagate Technology LLC
Current Assignee Address: US CA Scotts Valley
Agency: Hall Estill Attorneys at Law
Main IPC: H01L21/4763
IPC: H01L21/4763

Abstract:

Various embodiments of the present invention are generally directed to a method of forming a conductive via plug in a semiconductor device. A first and second metal layer are electrically connected by a via plug that is formed by depositing a tungsten seed layer on a plurality of metal barrier layers within a recess using atomic layer deposition. The recess is then filled with tungsten using chemical vapor deposition.

Abstract(Chinese):

本发明的各种实施例通常涉及在半导体器件中形成导电通孔的方法。通过使用原子层沉积在凹部内的多个金属阻挡层上沉积钨晶种层而形成的通孔塞电连接第一和第二金属层。然后使用化学气相沉积用凹槽填充钨。

Public/Granted literature

US20110006436A1 Conductive Via Plug Formation Public/Granted day:2011-01-13

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/02	.半导体器件或其部件的制造或处理
H01L21/04	..至少具有一个跃变势垒或表面势垒的器件，例如PN结、耗尽层、载体集结层
H01L21/34	...具有H01L21/06，H01L21/16及H01L21/18各组不包含的或有或无杂质，例如掺杂材料的半导体的器件
H01L21/46	....用H01L21/36至H01L21/428各组不包含的方法或设备处理半导体材料的（在半导体材料上制作电极的入H01L21/44）
H01L21/461	.....改变半导体材料的表面物理特性或形状的，例如腐蚀、抛光、切割
H01L21/4763	......非绝缘层的沉积，例如绝缘层上的导电层、电阻层；这些层的后处理（电极的制造入H01L21/28）