Invention Grant
- Patent Title: Synthesis of photoresist polymer
- Patent Title (中): 光致抗蚀剂聚合物的合成
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Application No.: US12177403Application Date: 2008-07-22
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Publication No.: US08193307B2Publication Date: 2012-06-05
- Inventor: Takanobu Takeda , Tamotsu Watanabe
- Applicant: Takanobu Takeda , Tamotsu Watanabe
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-190592 20070723
- Main IPC: C08F6/00
- IPC: C08F6/00

Abstract:
A polymer for use in photoresist compositions is synthesized by effecting polymerization reaction to form a polymerization product mixture and subjecting the mixture to molecular weight fractionation by a liquid phase separation technique using a good solvent and a poor solvent. The fractionation step is iterated at least twice, and one iteration of fractionation includes adding a good solvent which is different from the good solvent added in the other iteration of fractionation.
Public/Granted literature
- US20090030177A1 SYNTHESIS OF PHOTORESIST POLYMER Public/Granted day:2009-01-29
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