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US08193307B2 Synthesis of photoresist polymer 有权
光致抗蚀剂聚合物的合成

Synthesis of photoresist polymer
Abstract:
A polymer for use in photoresist compositions is synthesized by effecting polymerization reaction to form a polymerization product mixture and subjecting the mixture to molecular weight fractionation by a liquid phase separation technique using a good solvent and a poor solvent. The fractionation step is iterated at least twice, and one iteration of fractionation includes adding a good solvent which is different from the good solvent added in the other iteration of fractionation.
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