Invention Grant
- Patent Title: Transmission electron microscope and method for observing specimen image with the same
- Patent Title (中): 透射电子显微镜和用于观察样品图像的方法
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Application No.: US12850961Application Date: 2010-08-05
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Publication No.: US08193494B2Publication Date: 2012-06-05
- Inventor: Ken Harada , Akira Sugawara
- Applicant: Ken Harada , Akira Sugawara
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2009-184998 20090807
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/04 ; G01B15/00

Abstract:
A first electron biprism is disposed in a condenser optical system and an observation region of a specimen is irradiated simultaneously with two electron beams of different angles. The two electron beams that have simultaneously transmitted the specimen are spatially separated and focused with a second electron biprism disposed in an imaging optical system and two electron microscopic images of different irradiation angles are obtained. The two picture images are obtained by a detecting unit. Based on the two picture images, a stereoscopic image or two images having different kinds of information of the specimen is/are produced and displayed on a display device.
Public/Granted literature
- US20110031395A1 TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR OBSERVING SPECIMEN IMAGE WITH THE SAME Public/Granted day:2011-02-10
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