Invention Grant
- Patent Title: Semiconductor memory device and method of fabricating the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US12512788Application Date: 2009-07-30
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Publication No.: US08193576B2Publication Date: 2012-06-05
- Inventor: Kwang-Young Ko
- Applicant: Kwang-Young Ko
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2008-0074670 20080730
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L21/8247

Abstract:
A semiconductor memory device and a method of fabricating the same which is suitable for fabrication of a non-volatile memory, such as an EEPROM, using a polysilicon-insulator-polysilicon (PIP) process. The semiconductor memory device includes isolation layers defining a tunneling region and a read transistor region of a semiconductor substrate, a lower polysilicon film formed on and/or over the tunneling region and the read transistor region, a dielectric film formed on and/or over the lower polysilicon film in the tunneling region, and an upper polysilicon film formed on and/or over the dielectric film.
Public/Granted literature
- US20100025751A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2010-02-04
Information query
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