Invention Grant
US08193599B2 Fabricating method and structure of a wafer level module 有权
晶圆级模块的制造方法和结构

Fabricating method and structure of a wafer level module
Abstract:
A fabricating method includes adhering an exposed surface of a first solid adhesive film to a first substrate. The second surface of the first solid adhesive film is exposed and adhered to a second substrate. A third substrate is adhered to a second substrate via a patterned second solid adhesive film, and a diaphragm layer is adhered to the third substrate via a patterned third solid adhesive film. A fourth solid adhesive film with a removable release film is adhered to the first substrate covered, followed by slicing to form wafer level lens modules.
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