Invention Grant
- Patent Title: Packaging structure and method of a MEMS microphone
- Patent Title (中): MEMS麦克风的封装结构和方法
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Application No.: US11970527Application Date: 2008-01-08
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Publication No.: US08194896B2Publication Date: 2012-06-05
- Inventor: Wei-Min Hsiao
- Applicant: Wei-Min Hsiao
- Applicant Address: TW Nantze Export Processing Zone, Kao-Hsiung
- Assignee: Advanced Semiconductor Engineering, Inc.
- Current Assignee: Advanced Semiconductor Engineering, Inc.
- Current Assignee Address: TW Nantze Export Processing Zone, Kao-Hsiung
- Agent Winston Hsu; Scott Margo
- Priority: TW96101009A 20070110
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H01L29/84 ; H01L21/00

Abstract:
A package structure of MEMS microphone includes a carrier, a molding compound, a microphone chip and a lid. The carrier has an upper surface on which a chip region is defined, a lower surface and at least one guiding hole communicating with the upper surface and the lower surface. The molding compound has a ring wall portion surrounding the chip region and a filling portion filling the guiding hole. The microphone chip sited on the chip region of the carrier electrically connects the carrier. The lid is jointed to the ring wall portion of the molding compound. In this invention, the guiding hole is used to enable the ring wall portion and the filling portion of the molding compound to be formed integrally, so as to enhance the stability of the molding process and strengthen the structure of the carrier.
Public/Granted literature
- US20080166000A1 PACKAGING STRUCTURE AND METHOD OF A MEMS MICROPHONE Public/Granted day:2008-07-10
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