Invention Grant
- Patent Title: MEMS device and process
- Patent Title (中): MEMS器件和工艺
-
Application No.: US12678922Application Date: 2008-09-18
-
Publication No.: US08198715B2Publication Date: 2012-06-12
- Inventor: Richard Ian Laming , Colin Robert Jenkins
- Applicant: Richard Ian Laming , Colin Robert Jenkins
- Applicant Address: DE Edinburgh
- Assignee: Wolfson Microelectronics plc
- Current Assignee: Wolfson Microelectronics plc
- Current Assignee Address: DE Edinburgh
- Agency: Dickstein Shapiro LLP
- Priority: GB0718307.2 20070919
- International Application: PCT/GB2008/003192 WO 20080918
- International Announcement: WO2009/037480 WO 20090326
- Main IPC: H01L23/02
- IPC: H01L23/02
Abstract:
A MEMS transducer includes a substrate, a membrane layer and a back-plate layer. The membrane layer is supported by the substrate. The back-plate layer is supported by the membrane layer and includes a respective sidewall portion and a respective raised portion. One or more columns, separate from the sidewall portion of the back-plate layer, connect the back-plate layer, the membrane layer and the substrate.
Public/Granted literature
- US20100237447A1 MEMS DEVICE AND PROCESS Public/Granted day:2010-09-23
Information query
IPC分类:
