Invention Grant
US08205635B2 Flowmeter and flow-rate controller 有权
流量计和流量控制器

Flowmeter and flow-rate controller
Abstract:
A flowmeter in which a flow rate can be measured over a wide flow-rate range while an increase in the cost of manufacture thereof is minimized, and a flow-rate controller equipped with such a flowmeter are provided. Provided are an upstream-side pressure sensor that measures the pressure of a fluid in an upstream-side channel, a downstream-side pressure sensor that measures the pressure of the fluid in a downstream-side channel, a first throttle section disposed between the upstream-side channel and the downstream-side channel and having a channel area that is smaller than that of at least the upstream-side channel, a bypass channel branching off from between the upstream-side pressure sensor in the upstream-side channel and the first throttle section and connected with the downstream-side channel, an on/off valve that controls the flow rate of the fluid flowing through the bypass channel, and a second throttle section disposed between the bypass channel and the downstream-side channel and having a channel area that is smaller than that of at least the bypass channel.
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