Invention Grant
- Patent Title: Methods and apparatus for sealing a chamber
- Patent Title (中): 用于密封腔室的方法和装置
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Application No.: US11145018Application Date: 2005-06-02
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Publication No.: US08206075B2Publication Date: 2012-06-26
- Inventor: John M. White , Shinichi Kurita , William N. Sterling , Yoshiaki Tanase
- Applicant: John M. White , Shinichi Kurita , William N. Sterling , Yoshiaki Tanase
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C16/00
Abstract:
In certain aspects, a load lock chamber is provided that includes a body having at least one sealing surface wall including a sealing surface. The sealing surface wall has an opening adjacent the sealing surface adapted to input or output a substrate. The body further includes a plurality of side walls. The load lock chamber also includes a top coupled to the body. The top includes one or more openings that divide the top into a first portion and a second portion. The load lock chamber further includes one or more top sealing members adapted to cover each opening of the top. Each top sealing member absorbs a movement of the first portion of the top relative to the second portion of the top. Numerous other aspects are provided.
Public/Granted literature
- US20050285992A1 Methods and apparatus for sealing a chamber Public/Granted day:2005-12-29
Information query
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