Invention Grant
- Patent Title: Showerhead electrode
- Patent Title (中): 喷头电极
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Application No.: US12216525Application Date: 2008-07-07
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Publication No.: US08206506B2Publication Date: 2012-06-26
- Inventor: Babak Kadkhodayan , Rajinder Dhindsa , Anthony de la Llera , Michael C. Kellogg
- Applicant: Babak Kadkhodayan , Rajinder Dhindsa , Anthony de la Llera , Michael C. Kellogg
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: C23C16/50
- IPC: C23C16/50 ; C23C16/503
Abstract:
A showerhead electrode includes inner and outer steps at an outer periphery thereof, the outer step cooperating with a clamp ring which mechanically attaches the electrode to a backing plate.
Public/Granted literature
- US20100000683A1 Showerhead electrode Public/Granted day:2010-01-07
Information query
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