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US08206508B2 Wet surface treatment by usage of a liquid bath containing energy limited bubbles 失效
通过使用含有能量限制气泡的液体浴进行湿表面处理

  • Patent Title: Wet surface treatment by usage of a liquid bath containing energy limited bubbles
  • Patent Title (中): 通过使用含有能量限制气泡的液体浴进行湿表面处理
  • Application No.: US12027724
    Application Date: 2008-02-07
  • Publication No.: US08206508B2
    Publication Date: 2012-06-26
  • Inventor: Yehiel Gotkis
  • Applicant: Yehiel Gotkis
  • Agent Gideon Gimlan
  • Main IPC: B08B3/00
  • IPC: B08B3/00
Wet surface treatment by usage of a liquid bath containing energy limited bubbles
Abstract:
A method controllably and sustainably creates an upwardly directed gradient of dropping temperatures in a wet treatment tank between a cooled and face down workpiece (e.g., an in-process semiconductor wafer) and a lower down heat source. A thermal fluid upwell containing thermally collapsible bubbles is then directed from the heat source to the face down workpiece. In one class of embodiments, bubble collapse energy release and/or bubble collapse locations are controlled so as to avoid exposing delicate features of the to-be-treated surface to damaging forces. In one class of embodiments the wet treatment includes ultra-cleaning of the work face. Cleaning fluids that are essentially free of predefined contaminates are upwelled to the to-be-cleaned surface and potentially contaminated after-flows are convectively directed away from the workpiece so as to prevent recontamination of the workpiece.
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