Invention Grant
- Patent Title: Method and apparatus for an in-situ ultraviolet cleaning tool
- Patent Title (中): 用于原位紫外线清洁工具的方法和设备
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Application No.: US13027923Application Date: 2011-02-15
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Publication No.: US08206510B2Publication Date: 2012-06-26
- Inventor: Abbas Rastegar , Yoshiaki Ikuta
- Applicant: Abbas Rastegar , Yoshiaki Ikuta
- Applicant Address: US TX Austin
- Assignee: Sematech, Inc.
- Current Assignee: Sematech, Inc.
- Current Assignee Address: US TX Austin
- Agency: Fulbright & Jaworski L.L.P.
- Main IPC: B08B3/10
- IPC: B08B3/10
Abstract:
The present invention provides an apparatus and a method for an ultraviolet cleaning tool. The cleaning tool includes ultraviolet source spaced apart from a surface having contaminant particles. The ultraviolet source can create ozone between the surface and the ultraviolet source which breaks the chemical bonds between particles and the surface. The apparatus includes a gas feed which introduces a gas to aid the chemical bond. Additionally, the gas feed can introduce a gas to remove the particles from the surface.
Public/Granted literature
- US20110132394A1 Method and Apparatus for an In-Situ Ultraviolet Cleaning Tool Public/Granted day:2011-06-09
Information query
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