Invention Grant
- Patent Title: Supporting membranes on nanometer-scale self-assembled films
- Patent Title (中): 在纳米级自组装膜上支撑膜
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Application No.: US12641782Application Date: 2009-12-18
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Publication No.: US08206601B2Publication Date: 2012-06-26
- Inventor: Joan K. Bosworth , Elizabeth A. Dobisz , Ricardo Ruiz , Franck D. Rose dit Rose
- Applicant: Joan K. Bosworth , Elizabeth A. Dobisz , Ricardo Ruiz , Franck D. Rose dit Rose
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee: Hitachi Global Storage Technologies Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Zilka-Kotab, PC
- Main IPC: B44C1/22
- IPC: B44C1/22

Abstract:
Block copolymer lithography has emerged as an alternative lithographic method to achieve large-area, high-density patterns at resolutions near or beyond the limit of conventional lithographic techniques for the formation of bit patterned media and discrete track media. In one embodiment, a structure comprises a plurality of nanostructures extending upwardly from a substrate and a porous membrane extending across upper ends of the plurality of nanostructures. A method, according to another embodiment, comprises forming a block copolymer layer on a substrate, inducing self assembly of the block copolymer layer, selectively degrading a block polymer from the block copolymer layer, forming a porous membrane over the block copolymer layer, and removing a portion of the block copolymer layer for defining a plurality of nanostructures extending upwardly from the substrate after forming the porous membrane over the block copolymer layer. Other systems and methods are disclosed as well.
Public/Granted literature
- US20110151236A1 SUPPORTING MEMBRANES ON NANOMETER-SCALE SELF-ASSEMBLED FILMS Public/Granted day:2011-06-23
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