Invention Grant
- Patent Title: Methods and arrangements for managing plasma confinement
- Patent Title (中): 管理血浆限制的方法和安排
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Application No.: US12839374Application Date: 2010-07-19
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Publication No.: US08206604B2Publication Date: 2012-06-26
- Inventor: Sebastien Dine
- Applicant: Sebastien Dine
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: IPSG, P.C., Intellectual Property Law
- Main IPC: H05H1/02
- IPC: H05H1/02 ; H01L21/3065

Abstract:
A method for confining plasma within a plasma processing chamber while processing a substrate is provided. The method includes igniting the plasma within a plasma generating area, wherein the plasma generating area is surrounded by a set of confinement rings. The method also includes providing a chamber wall outside of the set of confinement rings. The method further includes providing a dielectric liner electrode arrangement positioned between the chamber wall and the set of confinement rings, wherein the dielectric liner electrode arrangement having an electrode encapsulated within a dielectric liner, the dielectric liner electrode arrangement being coupled with the chamber wall to create a modified chamber wall. The method yet also includes providing a parallel LC circuit arrangement, the parallel LC circuit arrangement being coupled between the dielectric liner electrode arrangement and the chamber wall.
Public/Granted literature
- US20100279028A1 METHODS AND ARRANGEMENTS FOR MANAGING PLASMA CONFINEMENT Public/Granted day:2010-11-04
Information query
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