Invention Grant
- Patent Title: Positive resist composition and resist pattern forming method
- Patent Title (中): 正抗蚀剂组合物和抗蚀剂图案形成方法
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Application No.: US11914451Application Date: 2006-04-26
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Publication No.: US08206887B2Publication Date: 2012-06-26
- Inventor: Takako Hirosaki , Daiju Shiono , Taku Hirayama
- Applicant: Takako Hirosaki , Daiju Shiono , Taku Hirayama
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2005-144391 20050517
- International Application: PCT/JP2006/308751 WO 20060426
- International Announcement: WO2006/123523 WO 20061123
- Main IPC: G03C1/00
- IPC: G03C1/00 ; G03F7/00

Abstract:
A positive resist composition includes a base material component (A) which exhibits increased alkali solubility under an action of an acid, and an acid generator component (B) which generates an acid upon exposure, wherein the base material component (A) contains a compound (A1) in which phenolic hydroxyl groups in a polyhydric phenol compound (a) containing two or more phenolic hydroxyl groups and having a molecular weight of 300 to 2,500 are protected with acid dissociable, dissolution inhibiting groups, and the compound (A1) exhibits a standard deviation (sn) of the number of protective groups per molecule of less than 1, or exhibits a standard deviation (sp) of a protection ratio (mol %) per molecule of less than 16.7.
Public/Granted literature
- US20090092921A1 POSITIVE RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD Public/Granted day:2009-04-09
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