Invention Grant
- Patent Title: Method for manufacturing a resistive switching memory device and devices obtained thereof
- Patent Title (中): 制造电阻式开关存储器件的方法及其获得的器件
-
Application No.: US12631361Application Date: 2009-12-04
-
Publication No.: US08206995B2Publication Date: 2012-06-26
- Inventor: Judit Gloria Lisoni Reyes , Ludovic Goux , Dirk Wouters
- Applicant: Judit Gloria Lisoni Reyes , Ludovic Goux , Dirk Wouters
- Applicant Address: BE
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP09153091 20090218
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/20

Abstract:
A method for manufacturing a resistive switching memory device comprises providing a substrate comprising an electrical contact, providing on the substrate a dielectric layer comprising a trench exposing the electrical contact, and providing in the trench at least the bottom electrode and the resistive switching element of the resistive memory device. The method may furthermore comprise providing a top electrode at least on or in the trench, in contact with the resistive switching element. The present invention also provides corresponding resistive switching memory devices.
Public/Granted literature
- US20100155687A1 METHOD FOR MANUFACTURING A RESISTIVE SWITCHING MEMORY DEVICE AND DEVICES OBTAINED THEREOF Public/Granted day:2010-06-24
Information query
IPC分类: