Invention Grant
US08207012B2 Method and apparatus for achieving low resistance contact to a metal based thin film solar cell
有权
用于实现与金属基薄膜太阳能电池的低电阻接触的方法和装置
- Patent Title: Method and apparatus for achieving low resistance contact to a metal based thin film solar cell
- Patent Title (中): 用于实现与金属基薄膜太阳能电池的低电阻接触的方法和装置
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Application No.: US12163819Application Date: 2008-06-27
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Publication No.: US08207012B2Publication Date: 2012-06-26
- Inventor: Mustafa Pinarbasi , Bulent M. Basol
- Applicant: Mustafa Pinarbasi , Bulent M. Basol
- Applicant Address: US CA San Jose
- Assignee: SoloPower, Inc.
- Current Assignee: SoloPower, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A system and method of forming a thin film solar cell with a metallic foil substrate are provided. After forming a semiconductor absorber film over the front surface of the metallic foil substrate a back surface of the metallic foil substrate is treated using a material removal process to form a treated back surface in a process chamber. In one embodiment, the material removal process is performed while depositing a transparent conductive layer over the semiconductor absorber film in the process chamber.
Public/Granted literature
- US20090269877A1 METHOD AND APPARATUS FOR ACHIEVING LOW RESISTANCE CONTACT TO A METAL BASED THIN FILM SOLAR CELL Public/Granted day:2009-10-29
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