Invention Grant
- Patent Title: Stressed Fin-FET devices with low contact resistance
- Patent Title (中): 具有低接触电阻的强调Fin-FET器件
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Application No.: US12786397Application Date: 2010-05-24
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Publication No.: US08207038B2Publication Date: 2012-06-26
- Inventor: Kangguo Cheng , Bruce B. Doris , Ali Khakifirooz , Pranita Kulkarni , Ghavam G. Shahidi
- Applicant: Kangguo Cheng , Bruce B. Doris , Ali Khakifirooz , Pranita Kulkarni , Ghavam G. Shahidi
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent George Sai-Halasz; Louis J. Percello
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for fabricating an FET device is disclosed. The method includes Fin-FET devices with fins that are composed of a first material, and then merged together by epitaxial deposition of a second material. The fins are vertically recesses using a selective etch. A continuous silicide layer is formed over the increased surface areas of the first material and the second material, leading to smaller resistance. A stress liner overlaying the FET device is afterwards deposited. An FET device is also disclosed, which FET device includes a plurality of Fin-FET devices, the fins of which are composed of a first material. The FET device includes a second material, which is epitaxially merging the fins. The fins are vertically recessed relative to an upper surface of the second material. The FET device furthermore includes a continuous silicide layer formed over the fins and over the second material, and a stress liner covering the device.
Public/Granted literature
- US20110284967A1 Stressed Fin-FET Devices with Low Contact Resistance Public/Granted day:2011-11-24
Information query
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