Invention Grant
- Patent Title: Apparatus and method for simultaneous treatment of multiple workpieces
- Patent Title (中): 用于同时处理多个工件的装置和方法
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Application No.: US12636490Application Date: 2009-12-11
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Publication No.: US08207047B2Publication Date: 2012-06-26
- Inventor: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
- Applicant: Steven M. Zuniga , Derek G. Aqui , Andrew J. Nagengast , Keenan Leon Guerrero , Harish K. Bolla , Aditya Agarwal
- Applicant Address: US CA San Jose
- Assignee: Twin Creeks Technologies, Inc.
- Current Assignee: Twin Creeks Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Cesari and McKenna, LLP
- Main IPC: H01L21/30
- IPC: H01L21/30

Abstract:
A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.
Public/Granted literature
- US20110143521A1 APPARATUS AND METHOD FOR SIMULTANEOUS TREATMENT OF MULTIPLE WORKPIECES Public/Granted day:2011-06-16
Information query
IPC分类: