Invention Grant
US08207069B2 Advanced mixing method for integrated tool having site-isolated reactors
有权
具有现场隔离反应堆的综合工具的先进混合方法
- Patent Title: Advanced mixing method for integrated tool having site-isolated reactors
- Patent Title (中): 具有现场隔离反应堆的综合工具的先进混合方法
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Application No.: US13189894Application Date: 2011-07-25
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Publication No.: US08207069B2Publication Date: 2012-06-26
- Inventor: Kurt H. Weiner , Tony P. Chiang , Aaron Francis , John Schmidt
- Applicant: Kurt H. Weiner , Tony P. Chiang , Aaron Francis , John Schmidt
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/306 ; C40B50/00 ; C40B60/00
Abstract:
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.
Public/Granted literature
- US20110281773A1 ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REACTORS Public/Granted day:2011-11-17
Information query
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