Invention Grant
US08207460B2 Electrostatically actuated non-latching and latching RF-MEMS switch
失效
静电驱动非锁定和闭锁RF-MEMS开关
- Patent Title: Electrostatically actuated non-latching and latching RF-MEMS switch
- Patent Title (中): 静电驱动非锁定和闭锁RF-MEMS开关
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Application No.: US12688043Application Date: 2010-01-15
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Publication No.: US08207460B2Publication Date: 2012-06-26
- Inventor: Lorenzo G. Rodriguez , James Henry Campbell , Jose G. Mireles
- Applicant: Lorenzo G. Rodriguez , James Henry Campbell , Jose G. Mireles
- Applicant Address: US TX El Paso
- Assignee: Senda Micro Technologies, Inc.
- Current Assignee: Senda Micro Technologies, Inc.
- Current Assignee Address: US TX El Paso
- Agent Melissa A. Asfahani; Kermit D. Lopez; Luis M. Ortiz
- Main IPC: H01H57/00
- IPC: H01H57/00 ; H01H51/22

Abstract:
An RF MEMS switch apparatus includes a planar substrate and an electrostatic actuator formed thereon. The electrostatic actuator includes two sets of interdigitated comb which is capable of moving an armature and a shunt contact head. The armature can be connected to the substrate through a main return spring and one or more contact head support springs. The shunt contact head includes a primary shunt contact and one or more spring-loaded sacrificial contacts. The shunt contact head can serve as a primary contact to bridge a stationary input electrode and an output electrode. The switch is off in a relaxed position and when actuated the primary shunt contact comes into direct mechanical contact with the stationary input electrode and the stationary output electrode. The switch remains closed as long as the actuator is powered and the springs return the armature to the relaxed position when the power is removed.
Public/Granted literature
- US20100181173A1 ELECTROSTATICALLY ACTUATED NON-LATCHING AND LATCHING RF-MEMS SWITCH Public/Granted day:2010-07-22
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