Invention Grant
- Patent Title: Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same
- Patent Title (中): 具有可变电容器的微机械传感器和使用其的电磁辐射检测方法
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Application No.: US12620301Application Date: 2009-11-17
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Publication No.: US08207500B2Publication Date: 2012-06-26
- Inventor: Sebastian Guenther , Nicolaus Ulbrich , Volker Materna
- Applicant: Sebastian Guenther , Nicolaus Ulbrich , Volker Materna
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008043797 20081117
- Main IPC: G01J5/00
- IPC: G01J5/00
Abstract:
A sensor for detecting electromagnetic radiation, having a detection element; and at least one electrode; the detection element and the at least one electrode forming a variable capacitor, and a change in the capacitance of the capacitor being caused by the detected electromagnetic radiation.
Public/Granted literature
- US20100127175A1 MICROMECHANICAL INFRARED SENSOR AND EVALUATION CONCEPT Public/Granted day:2010-05-27
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