Invention Grant
- Patent Title: Integrated circuitry
- Patent Title (中): 集成电路
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Application No.: US11638931Application Date: 2006-12-13
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Publication No.: US08207563B2Publication Date: 2012-06-26
- Inventor: Cem Basceri , Gurtej S. Sandhu
- Applicant: Cem Basceri , Gurtej S. Sandhu
- Applicant Address: US NY Mt. Kisco
- Assignee: Round Rock Research, LLC
- Current Assignee: Round Rock Research, LLC
- Current Assignee Address: US NY Mt. Kisco
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes comprising sidewalls. The plurality of capacitor electrodes are supported at least in part with a retaining structure which engages the sidewalls, with the retaining structure comprising a fluid pervious material. A capacitor dielectric material is deposited over the capacitor electrodes through the fluid pervious material of the retaining structure effective to deposit capacitor dielectric material over portions of the sidewalls received below the retaining structure. Capacitor electrode material is deposited over the capacitor dielectric material through the fluid pervious material of the retaining structure effective to deposit capacitor electrode material over at least some of the capacitor dielectric material received below the retaining structure. Integrated circuitry independent of method of fabrication is also contemplated.
Public/Granted literature
- US20070093022A1 Integrated circuitry Public/Granted day:2007-04-26
Information query
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