Invention Grant
- Patent Title: Magnetic sensor and manufacturing method therefor
- Patent Title (中): 磁传感器及其制造方法
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Application No.: US12137199Application Date: 2008-06-11
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Publication No.: US08207587B2Publication Date: 2012-06-26
- Inventor: Kokichi Aiso
- Applicant: Kokichi Aiso
- Applicant Address: JP Hamamatsu-Shi
- Assignee: Yamaha Corporation
- Current Assignee: Yamaha Corporation
- Current Assignee Address: JP Hamamatsu-Shi
- Agency: Dickstein Shapiro LLP
- Priority: JP2007-156378 20070613
- Main IPC: H01L29/82
- IPC: H01L29/82

Abstract:
A magnetic sensor for detecting magnetism in two-axial directions or three-axial directions is constituted of a substrate, a silicon oxide film that is formed on the substrate so as to form the planar surface and slopes, a plurality of magnetoresistive elements, each of which is formed by laminating a free layer, a conductive layer, and a pin layer on the substrate, a plurality of lead films that are formed to connect the magnetoresistive elements in series, a CVD oxide film for covering the magnetoresistive elements, and a non-magnetic film that is formed between the magnetoresistive elements and the CVD oxide film so as to cover the periphery of the free layer with respect to each magnetoresistive element. Thus, it is possible for the magnetic sensor to include the magnetoresistive elements having superior hysteresis characteristics.
Public/Granted literature
- US20080316654A1 MAGNETIC SENSOR AND MANUFACTURING METHOD THEREFOR Public/Granted day:2008-12-25
Information query
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