Invention Grant
- Patent Title: Surface acoustic wave sensor
- Patent Title (中): 表面声波传感器
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Application No.: US13315309Application Date: 2011-12-09
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Publication No.: US08207650B2Publication Date: 2012-06-26
- Inventor: Kenji Nishiyama , Yusuke Suzuki , Shigeo Ito , Michio Kadota
- Applicant: Kenji Nishiyama , Yusuke Suzuki , Shigeo Ito , Michio Kadota
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2009-150419 20090625
- Main IPC: H03H9/25
- IPC: H03H9/25

Abstract:
A surface acoustic wave sensor that achieves increased detection sensitivity includes a piezoelectric substrate, an IDT electrode provided on the piezoelectric substrate, and a protection layer arranged on the piezoelectric substrate so as to cover the IDT electrode. The surface acoustic wave sensor is arranged so as to be excited by the IDT electrode in a high-order mode of an SH wave in which displacement at a surface of the protection layer and displacement near a boundary between the piezoelectric substrate and the IDT electrode have opposite directions, and the maximum displacement occurs at the surface of the protection layer.
Public/Granted literature
- US20120074809A1 SURFACE ACOUSTIC WAVE SENSOR Public/Granted day:2012-03-29
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