Invention Grant
- Patent Title: Testing apparatus
- Patent Title (中): 测试仪器
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Application No.: US12646736Application Date: 2009-12-23
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Publication No.: US08207744B2Publication Date: 2012-06-26
- Inventor: Noboru Okino
- Applicant: Noboru Okino , Masumi Okino, legal representative
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2007-171555 20070629
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
There is provided a testing apparatus including a plurality of test units, a storage that is shared by the plurality of test units, where the storage stores therein wafers under test to be tested by the plurality of test units, a transport mechanism that transports the wafers under test between the storage and each of the plurality of test units, a mainframe that specifies a test procedure for each of the plurality of test units, a power source that is shared by the plurality of test units, where the power source supplies power to each of the plurality of test units, and a pressure source that is shared by the plurality of test units, where the pressure source supplies a pressure to each of the plurality of test units. Here, each of the plurality of test units includes a test module that transmits and receives a test signal to/from a plurality of circuits formed on a wafer under test, a connector that connects together transmission paths of the test signal between the test module and the wafer under test, a holding member that brings the wafer under test into contact with the connector when supplied with the pressure, and a housing that houses therein the holding member and the connector, where the wafer under test is to be tested within the housing.
Public/Granted literature
- US20100156434A1 Testing Apparatus Public/Granted day:2010-06-24
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