Invention Grant
US08209766B2 Scanning probe microscope capable of measuring samples having overhang structure
有权
扫描探针显微镜能够测量具有突出结构的样品
- Patent Title: Scanning probe microscope capable of measuring samples having overhang structure
- Patent Title (中): 扫描探针显微镜能够测量具有突出结构的样品
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Application No.: US12705301Application Date: 2010-02-12
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Publication No.: US08209766B2Publication Date: 2012-06-26
- Inventor: Sang-il Park , Sang Han Chung , Byoung-Woon Ahn
- Applicant: Sang-il Park , Sang Han Chung , Byoung-Woon Ahn
- Applicant Address: KR Suwon
- Assignee: Park Systems Corp.
- Current Assignee: Park Systems Corp.
- Current Assignee Address: KR Suwon
- Agency: Patterson & Sheridan, LLP
- Main IPC: G01N13/16
- IPC: G01N13/16 ; H01J37/20

Abstract:
A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide by a rack-and-pinion drive system and has grooves that engage with corresponding ceramic balls formed on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide. The grooves are urged against the ceramic balls via a spring force and, prior to movement of the movable assembly, a pneumatic force is applied to overcome the spring force and disengage the grooves from the ceramic balls.
Public/Granted literature
- US20100170015A1 SCANNING PROBE MICROSCOPE CAPABLE OF MEASURING SAMPLES HAVING OVERHANG STRUCTURE Public/Granted day:2010-07-01
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