Invention Grant
- Patent Title: Resonator device for detecting helium
- Patent Title (中): 用于检测氦的谐振器装置
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Application No.: US12510433Application Date: 2009-07-28
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Publication No.: US08210027B2Publication Date: 2012-07-03
- Inventor: Atul Goel
- Applicant: Atul Goel
- Applicant Address: SG Singapore
- Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: G01N29/02
- IPC: G01N29/02

Abstract:
A device for detecting helium in ambient atmosphere includes a resonator and a frequency detector. The resonator includes a piezoelectric film layer configured to absorb helium atoms. The frequency detector configured to detect a change in resonant frequency of the resonator when helium is absorbed into the piezoelectric film layer from the ambient atmosphere.
Public/Granted literature
- US20110023607A1 RESONATOR DEVICE FOR DETECTING HELIUM Public/Granted day:2011-02-03
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