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US08210027B2 Resonator device for detecting helium 有权
用于检测氦的谐振器装置

Resonator device for detecting helium
Abstract:
A device for detecting helium in ambient atmosphere includes a resonator and a frequency detector. The resonator includes a piezoelectric film layer configured to absorb helium atoms. The frequency detector configured to detect a change in resonant frequency of the resonator when helium is absorbed into the piezoelectric film layer from the ambient atmosphere.
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