Invention Grant
- Patent Title: Drive frequency tunable MEMS gyroscope
- Patent Title (中): 驱动频率可调MEMS陀螺仪
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Application No.: US12372335Application Date: 2009-02-17
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Publication No.: US08210038B2Publication Date: 2012-07-03
- Inventor: Marko Rocznik
- Applicant: Marko Rocznik
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A drive frequency tunable MEMS sensor in one embodiment includes a mass, a mass drive component configured to drive the mass within a plane, a plurality of non-linear springs supporting the mass a first tuner operably connected to the plurality of non-linear springs for modifying the stress condition of the plurality of non-linear springs in response to a trim voltage, and a trim circuit electrically coupled with the first tuner for providing the trim voltage.
Public/Granted literature
- US20100206071A1 DRIVE FREQUENCY TUNABLE MEMS GYROSCOPE Public/Granted day:2010-08-19
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