Invention Grant
US08210038B2 Drive frequency tunable MEMS gyroscope 有权
驱动频率可调MEMS陀螺仪

Drive frequency tunable MEMS gyroscope
Abstract:
A drive frequency tunable MEMS sensor in one embodiment includes a mass, a mass drive component configured to drive the mass within a plane, a plurality of non-linear springs supporting the mass a first tuner operably connected to the plurality of non-linear springs for modifying the stress condition of the plurality of non-linear springs in response to a trim voltage, and a trim circuit electrically coupled with the first tuner for providing the trim voltage.
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