Invention Grant
US08210789B2 Method of assembling substrate transfer device and transfer system unit for the same 有权
组装基板转移装置和转运系统装置的方法

Method of assembling substrate transfer device and transfer system unit for the same
Abstract:
An assembly method of assembling a substrate transfer device including: a transfer system unit forming step of fixing a robot and a substrate container retainer to a divided body which composes a part of the substrate transfer device and is formed separably on a main structural body as a residual part of the substrate transfer device, thereby forming a transfer system unit; an operation examination step of examining whether the robot fixed to the transfer system unit can operate as a part of the substrate transfer device or not; and a mounting step of mounting the transfer system unit on the main structural body of the substrate transfer device after the operation examination step.
Information query
Patent Agency Ranking
0/0