Invention Grant
US08210831B2 Piezoelectric pump 有权
压电泵

Piezoelectric pump
Abstract:
A piezoelectric pump includes a diaphragm that defines a pump chamber between the diaphragm and a pump body, and a piezoelectric element bonded to a surface of the diaphragm. The piezoelectric element is a bimorph piezoelectric element in which a plurality of piezoelectric layers are stacked, including a neutral layer disposed in the approximate middle of the piezoelectric element in the thickness direction and that is not displaced. The piezoelectric element can be efficiently displaced because a neutral plane of the diaphragm and the piezoelectric element bonded therein is located in the neutral layer.
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