Invention Grant
US08210840B2 Diaphragm flexure with large range and high load capacity 有权
隔膜挠曲大范围和高负载能力

Diaphragm flexure with large range and high load capacity
Abstract:
A stamping structure for imprinting micro-sized features is provided. The stamping structure includes a flexure arrangement having one or more diaphragm flexures arranged in a series or parallel or hybrid configuration so as to manage load-capacity while still achieving adequate vertical and angular range of a sample supported on the one or more diaphragm flexures.
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