Invention Grant
US08211244B2 Tantalum carbide, method for producing tantalum carbide, tantalum carbide wiring and tantalum carbide electrode 有权
碳化钽,碳化钽的生产方法,碳化钽布线和碳化钽电极

Tantalum carbide, method for producing tantalum carbide, tantalum carbide wiring and tantalum carbide electrode
Abstract:
The present invention relates to a method for manufacturing tantalum carbide which can form tantalum carbide having a prescribed shape using a simple method, can form the tantalum carbide having a uniform thickness even when the tantalum carbide is coated on the surface of an article and is not peeled off by a thermal history, tantalum carbide obtained by the manufacturing method, wiring of tantalum carbide, and electrodes of tantalum carbide, where the tantalum carbide is formed on the surface of tantalum or a tantalum alloy by placing the tantalum or tantalum alloy in a vacuum heat treatment furnace, heat-treating the tantalum or tantalum alloy under a condition where a native oxide layer of Ta2O5 formed on the surface of tantalum or tantalum alloy is sublimated to remove the Ta2O5, introducing a carbon source into the vacuum heat treatment furnace, and then heat-treating.
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