Invention Grant
- Patent Title: Tantalum carbide, method for producing tantalum carbide, tantalum carbide wiring and tantalum carbide electrode
- Patent Title (中): 碳化钽,碳化钽的生产方法,碳化钽布线和碳化钽电极
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Application No.: US12781501Application Date: 2010-05-17
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Publication No.: US08211244B2Publication Date: 2012-07-03
- Inventor: Tadaaki Kaneko , Yasushi Asaoka , Naokatsu Sano
- Applicant: Tadaaki Kaneko , Yasushi Asaoka , Naokatsu Sano
- Applicant Address: JP Osaka-shi
- Assignee: Toyo Tanso Co., Ltd.
- Current Assignee: Toyo Tanso Co., Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2003-284708 20030801
- Main IPC: C23C8/00
- IPC: C23C8/00 ; C01B31/30

Abstract:
The present invention relates to a method for manufacturing tantalum carbide which can form tantalum carbide having a prescribed shape using a simple method, can form the tantalum carbide having a uniform thickness even when the tantalum carbide is coated on the surface of an article and is not peeled off by a thermal history, tantalum carbide obtained by the manufacturing method, wiring of tantalum carbide, and electrodes of tantalum carbide, where the tantalum carbide is formed on the surface of tantalum or a tantalum alloy by placing the tantalum or tantalum alloy in a vacuum heat treatment furnace, heat-treating the tantalum or tantalum alloy under a condition where a native oxide layer of Ta2O5 formed on the surface of tantalum or tantalum alloy is sublimated to remove the Ta2O5, introducing a carbon source into the vacuum heat treatment furnace, and then heat-treating.
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