Invention Grant
- Patent Title: Method for fabricating micro and nano structures
- Patent Title (中): 制造微结构和纳米结构的方法
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Application No.: US12938973Application Date: 2010-11-03
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Publication No.: US08211321B2Publication Date: 2012-07-03
- Inventor: Benzhong Wang , Soo Jin Chua
- Applicant: Benzhong Wang , Soo Jin Chua
- Applicant Address: SG Singapore
- Assignee: Agency for Science, Technology and Research
- Current Assignee: Agency for Science, Technology and Research
- Current Assignee Address: SG Singapore
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Victor A. Cardona
- Priority: SG200605650-1 20060822
- Main IPC: B29D11/00
- IPC: B29D11/00

Abstract:
A method of forming an array of selectively shaped optical elements on a substrate, the method including the steps of providing the substrate, the substrate having an optical layer placed thereon; placing a layer of particles on the optical layer; performing an etching cycle. The cycle includes the steps of: etching the layer of particles, using a first etching process so as to reduce the size of the particles within the layer, then; simultaneously etching the optical layer and the layer of particles, using a second etching process, the further reducing particles forming a mask over areas of the optical layer to create discrete optical elements from the optical layer.
Public/Granted literature
- US20110095324A1 METHOD FOR FABRICATING MICRO AND NANO STRUCTURES Public/Granted day:2011-04-28
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