Invention Grant
- Patent Title: Cushion for polishing pad and polishing pad using the cushion
- Patent Title (中): 垫子用于抛光垫和抛光垫使用垫子
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Application No.: US12531647Application Date: 2008-03-19
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Publication No.: US08211543B2Publication Date: 2012-07-03
- Inventor: Mitsuru Kato , Hirofumi Kikuchi , Shinya Kato
- Applicant: Mitsuru Kato , Hirofumi Kikuchi , Shinya Kato
- Applicant Address: JP Kurashiki-shi
- Assignee: Kuraray Co., Ltd.
- Current Assignee: Kuraray Co., Ltd.
- Current Assignee Address: JP Kurashiki-shi
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: JP2007-071975 20070320
- International Application: PCT/JP2008/055030 WO 20080319
- International Announcement: WO2008/123085 WO 20081016
- Main IPC: B24D11/00
- IPC: B24D11/00 ; B32B25/08 ; B32B25/16 ; B32B25/20 ; B32B27/40

Abstract:
The invention provides a cushion for a polishing pad, wherein, when a dynamic compression viscoelasticity measurement is performed under conditions of 23° C., a static load of 27.6 kPa, a frequency of 11 Hz and an amplitude of 1 μm, (1) a phase difference between dynamic stress and deformation is 4° or less, and (2) a ratio of the maximum value of the deformation amount to the maximum value of the dynamic stress ([maximum value of deformation amount]/[maximum value of dynamic stress]) is 0.5 μm/kPa or more. The invention also provides a polishing pad having a layer of the cushion for a polishing pad and a polishing layer.
Public/Granted literature
- US20100120343A1 CUSHION FOR POLISHING PAD AND POLISHING PAD USING THE CUSHION Public/Granted day:2010-05-13
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