Invention Grant
- Patent Title: Photoresist composition and patterning method thereof
- Patent Title (中): 光刻胶组合物及其图案化方法
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Application No.: US12376107Application Date: 2007-08-02
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Publication No.: US08211614B2Publication Date: 2012-07-03
- Inventor: Shi-Jin Sung , Sang-Haeng Lee , Sang-Tae Kim
- Applicant: Shi-Jin Sung , Sang-Haeng Lee , Sang-Tae Kim
- Applicant Address: KR Seoul
- Assignee: Dongwoo Fine-Chem. Co., Ltd.
- Current Assignee: Dongwoo Fine-Chem. Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Baker & Hostetler LLP
- Priority: KR10-2006-0073900 20060804
- International Application: PCT/KR2007/003726 WO 20070802
- International Announcement: WO2008/016270 WO 20080207
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/30

Abstract:
Disclosed is a resist composition which has desirable physical properties such as sensitivity, resolution, residual film ratio and coating property, and forms a pattern having the desirable profile and depth of focus due to excellent light transmissivity during a semiconductor process and a flat panel display process using a short wavelength of 248 nm (KrF) or less, even though the resist composition is applied to a non-chemically amplified resist. The photoresist composition comprises a novolac-based resin A, a photosensitizer B, and a low molecular substance C having low absorbance. The low molecular substance having low absorbance has absorbance that is lower than absorbance of the novolac-based resin at one or more wavelengths of 248 nm, 193 nm, and 157 nm, and the photoresist composition is used at the wavelength of 248 nm or less.
Public/Granted literature
- US20100203444A1 PHOTORESIST COMPOSITION AND PATTERNING METHOD THEREOF Public/Granted day:2010-08-12
Information query
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