Invention Grant
US08211616B2 Positive resist composition and method of forming resist pattern
有权
正型抗蚀剂组合物和形成抗蚀剂图案的方法
- Patent Title: Positive resist composition and method of forming resist pattern
- Patent Title (中): 正型抗蚀剂组合物和形成抗蚀剂图案的方法
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Application No.: US12500528Application Date: 2009-07-09
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Publication No.: US08211616B2Publication Date: 2012-07-03
- Inventor: Hiroaki Shimizu , Tsuyoshi Nakamura , Yoshiyuki Utsumi , Keita Ishiduka , Kensuke Matsuzawa , Akiya Kawaue
- Applicant: Hiroaki Shimizu , Tsuyoshi Nakamura , Yoshiyuki Utsumi , Keita Ishiduka , Kensuke Matsuzawa , Akiya Kawaue
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2008-187716 20080718
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20

Abstract:
A positive resist composition including a resin component (A) having a structural unit (a0) represented by general formula (a0-1) (R represents a hydrogen atom, a C1-C5 alkyl group or a C1-C5 halogenated alkyl group; R1 represents a C3 or more branched alkyl group; and each of R2 and R3 independently represents an alkyl group, wherein R2 and R3 may be mutually bonded to form a polycyclic group) and/or general formula (a0-2) (R is the same as defined above; R8 represents a divalent linking group that contains no halogen atom; and R7 represents an acid dissociable, dissolution inhibiting group), and an acid generator (B1) consisting of a compound represented by general formula (b1) (Y1 represents a C1-C4 fluorinated alkylene group which may have a substituent; X represents a C3-C30 aliphatic cyclic group which may have a substituent; and A+ represents an organic cation).
Public/Granted literature
- US20100015553A1 POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2010-01-21
Information query
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