Invention Grant
US08211625B2 Method of forming a locally periodic 3D structure with larger-scale variation in periodic properties and applications thereof
有权
形成周期性特性和应用中具有较大尺度变化的局部周期性3D结构的方法
- Patent Title: Method of forming a locally periodic 3D structure with larger-scale variation in periodic properties and applications thereof
- Patent Title (中): 形成周期性特性和应用中具有较大尺度变化的局部周期性3D结构的方法
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Application No.: US12266869Application Date: 2008-11-07
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Publication No.: US08211625B2Publication Date: 2012-07-03
- Inventor: William J. Arora , George Barbastathis
- Applicant: William J. Arora , George Barbastathis
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Gesmer Updegrove LLP
- Main IPC: G02F7/20
- IPC: G02F7/20
Abstract:
An optical structure is provided. The optical structure includes a substrate structure. A photosensitive material layer is positioned on said substrate structure. The photosensitive material layer having uniform periodic geometry and a period length throughout associated with a 2D periodic pattern. The 2D periodic pattern includes a period length greater than the exposing light wavelength and spatial variation in the duty cycle of the features of a mask layer used in the formation of said 2D periodic pattern.
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