Invention Grant
- Patent Title: Flip-chip GaN LED fabrication method
- Patent Title (中): 倒装GaN LED制造方法
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Application No.: US13165238Application Date: 2011-06-21
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Publication No.: US08211722B2Publication Date: 2012-07-03
- Inventor: Lien-Shine Lu
- Applicant: Lien-Shine Lu
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Main IPC: H01L33/10
- IPC: H01L33/10

Abstract:
A flip-chip LED fabrication method includes the steps of (a) providing a GaN epitaxial wafer, (b) forming a first groove in the GaN epitaxial layer, (c) forming a second groove in the GaN epitaxial layer to expose a part of the N-type GaN ohmic contact layer of the GaN epitaxial layer, (d) forming a translucent conducting layer on the epitaxial layer, (e) forming a P-type electrode pad and an N-type electrode pad on the translucent conducting layer, (f) forming a first isolation protection layer on the P-type electrode pad, the N-type electrode pad, the first groove and the second groove, (g) forming a metallic reflection layer on the first isolation protection layer, (h) forming a second isolation protection layer on the first isolation protection layer and the metallic reflection layer, (i) forming a third groove to expose one lateral side of the N-type electrode pad, (j) separating the processed GaN epitaxial wafer into individual GaN LED chips, and (k) bonding at least one individual GaN LED chip thus obtained to a thermal substrate with a conducting material.
Public/Granted literature
- US20110294242A1 FLIP-CHIP GAN LED FABRICATION METHOD Public/Granted day:2011-12-01
Information query
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