Invention Grant
US08211729B2 Method for releasing the suspended structure of a NEMS and/or NEMS component
有权
释放NEMS和/或NEMS组件的挂起结构的方法
- Patent Title: Method for releasing the suspended structure of a NEMS and/or NEMS component
- Patent Title (中): 释放NEMS和/或NEMS组件的挂起结构的方法
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Application No.: US12793156Application Date: 2010-06-03
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Publication No.: US08211729B2Publication Date: 2012-07-03
- Inventor: Cecilia Dupre , Philippe Robert
- Applicant: Cecilia Dupre , Philippe Robert
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0953976 20090615
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
A method for making a microelectronic device comprising at least one electromechanical component provided with a mobile structure, the method comprising the steps of: forming in at least one fine semiconducting thin layer lying on a supporting layer, at least one bar bound to a block, said bar being intended to form a mobile structure of an electromechanical component, withdrawing a portion of the supporting layer under said bar, forming at least one passivation layer based on dielectric material around said bar, forming an encapsulation layer around the bar and covering said passivation layer, the method further comprising steps of: making metal contact and/or interconnection areas, and then suppressing the encapsulation layer around said bar.
Public/Granted literature
- US20100317137A1 METHOD FOR RELEASING THE SUSPENDED STRUCTURE OF A NEMS AND/OR NEMS COMPONENT Public/Granted day:2010-12-16
Information query
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