Invention Grant
US08211735B2 Nano/microwire solar cell fabricated by nano/microsphere lithography
有权
通过纳米/微球光刻制造的纳米/微丝太阳能电池
- Patent Title: Nano/microwire solar cell fabricated by nano/microsphere lithography
- Patent Title (中): 通过纳米/微球光刻制造的纳米/微丝太阳能电池
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Application No.: US12480163Application Date: 2009-06-08
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Publication No.: US08211735B2Publication Date: 2012-07-03
- Inventor: William Graham , Supratik Guha , Oki Gunawan , George S. Tulevski , Kejia Wang , Ying Zhang
- Applicant: William Graham , Supratik Guha , Oki Gunawan , George S. Tulevski , Kejia Wang , Ying Zhang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Vazken Alexanian; Michael J. Chang, LLC
- Main IPC: H01L21/28
- IPC: H01L21/28

Abstract:
Techniques for fabricating nanowire/microwire-based solar cells are provided. In one, a method for fabricating a solar cell is provided. The method includes the following steps. A doped substrate is provided. A monolayer of spheres is deposited onto the substrate. The spheres include nanospheres, microspheres or a combination thereof The spheres are trimmed to introduce space between individual spheres in the monolayer. The trimmed spheres are used as a mask to pattern wires in the substrate. The wires include nanowires, microwires or a combination thereof A doped emitter layer is formed on the patterned wires. A top contact electrode is deposited over the emitter layer. A bottom contact electrode is deposited on a side of the substrate opposite the wires.
Public/Granted literature
- US20100221866A1 Nano/Microwire Solar Cell Fabricated by Nano/Microsphere Lithography Public/Granted day:2010-09-02
Information query
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