Invention Grant
- Patent Title: Semiconductor device of common source structure and manufacturing method of semiconductor device of common source structure
- Patent Title (中): 共同源结构的半导体器件和半导体器件的共同源结构的制造方法
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Application No.: US12623734Application Date: 2009-11-23
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Publication No.: US08211764B2Publication Date: 2012-07-03
- Inventor: Nam Yoon Kim
- Applicant: Nam Yoon Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: KR10-2008-0131379 20081222
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A semiconductor device having a common source structure and method of manufacturing the same are provided. In one embodiment, the method includes: forming a plurality of gate lines on a semiconductor substrate, each constituted by a floating gate, a dielectric layer, and a control gate having a line form; forming a first dielectric layer on the semiconductor substrate including the gate line; forming a trench having the line form in the first dielectric layer, wherein the trench exposes the semiconductor substrate between the gate lines; and forming a common source in the trench. According to an embodiment, the common source is implemented as a poly line in the trench. Therefore, etching the substrate to provide a trench for a common source can be excluded. Accordingly, it is possible to inhibit the common source from being opened due to a remaining material in a trench, and reduce damage to the semiconductor substrate.
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Information query
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