Invention Grant
US08211770B2 Transistor with A-face conductive channel and trench protecting well region
有权
具有A面导电沟道和沟槽保护阱区的晶体管
- Patent Title: Transistor with A-face conductive channel and trench protecting well region
- Patent Title (中): 具有A面导电沟道和沟槽保护阱区的晶体管
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Application No.: US13167806Application Date: 2011-06-24
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Publication No.: US08211770B2Publication Date: 2012-07-03
- Inventor: Qingchun Zhang , Anant Agarwal , Charlotte Jonas
- Applicant: Qingchun Zhang , Anant Agarwal , Charlotte Jonas
- Applicant Address: US NC Durham
- Assignee: Cree, Inc.
- Current Assignee: Cree, Inc.
- Current Assignee Address: US NC Durham
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A transistor structure optimizes current along the A-face of a silicon carbide body to form an AMOSFET that minimizes the JFET effect in the drift region during forward conduction in the on-state. The AMOSFET further shows high voltage blocking ability due to the addition of a highly doped well region that protects the gate corner region in a trench-gated device. The AMOSFET uses the A-face conduction along a trench sidewall in addition to a buried channel layer extending across portions of the semiconductor mesas defining the trench. A doped well extends from at least one of the mesas to a depth within the current spreading layer that is greater than the depth of the trench. A current spreading layer extends between the semiconductor mesas beneath the bottom of the trench to reduce junction resistance in the on-state. A buffer layer between the trench and the deep well further provides protection from field crowding at the trench corner.
Public/Granted literature
- US20110250737A1 TRANSISTOR WITH A-FACE CONDUCTIVE CHANNEL AND TRENCH PROTECTING WELL REGION Public/Granted day:2011-10-13
Information query
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