Invention Grant
- Patent Title: Two-dimensional condensation for uniaxially strained semiconductor fins
- Patent Title (中): 用于单轴应变半导体翅片的二维冷凝
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Application No.: US12646427Application Date: 2009-12-23
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Publication No.: US08211772B2Publication Date: 2012-07-03
- Inventor: Jack T. Kavalieros , Nancy M. Zelick , Been-Yih Jin , Markus Kuhn , Stephen M. Cea
- Applicant: Jack T. Kavalieros , Nancy M. Zelick , Been-Yih Jin , Markus Kuhn , Stephen M. Cea
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Techniques are disclosed for enabling multi-sided condensation of semiconductor fins. The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded.
Public/Granted literature
- US20110147811A1 TWO-DIMENSIONAL CONDENSATION FOR UNIAXIALLY STRAINED SEMICONDUCTOR FINS Public/Granted day:2011-06-23
Information query
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