Invention Grant
- Patent Title: Integrated circuit line with electromigration barriers
- Patent Title (中): 集成电路线与电迁移障碍
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Application No.: US12652485Application Date: 2010-01-05
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Publication No.: US08211776B2Publication Date: 2012-07-03
- Inventor: David V. Horak , Takeshi Nogami , Shom Ponoth , Chih-Chao Yang
- Applicant: David V. Horak , Takeshi Nogami , Shom Ponoth , Chih-Chao Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Wenji Li
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
A method for fabricating an integrated circuit comprising an electromigration barrier in a line of the integrated circuit includes forming a spacer; forming a segmented line adjacent to opposing sides of the spacer, the segmented line formed from a first conductive material; removing the spacer to form an empty line break; and filling the empty line break with a second conductive material to form an electromigration barrier that isolates electromigration effects within individual segments of the segmented line. An integrated circuit comprising an electromigration barrier includes a line, the line comprising a first conductive material, the line further comprising a plurality of line segments separated by one or more electromigration barriers, wherein the one or more electromigration barriers comprise a second conductive material that isolates electromigration effects within individual segments of the line.
Public/Granted literature
- US20110163450A1 INTEGRATED CIRCUIT LINE WITH ELECTROMIGRATION BARRIERS Public/Granted day:2011-07-07
Information query
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