Invention Grant
- Patent Title: Metal wiring layer and method of fabricating the same
- Patent Title (中): 金属布线层及其制造方法
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Application No.: US12290594Application Date: 2008-10-31
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Publication No.: US08211797B2Publication Date: 2012-07-03
- Inventor: Dong-Ju Yang , Shin-Il Choi , Sang-Gab Kim , Min-Seok Oh , Hong-Kee Chin , Ki-Yeup Lee , Yu-Gwang Jeong , Seung-Ha Choi
- Applicant: Dong-Ju Yang , Shin-Il Choi , Sang-Gab Kim , Min-Seok Oh , Hong-Kee Chin , Ki-Yeup Lee , Yu-Gwang Jeong , Seung-Ha Choi
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2007-0112342 20071105
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A metal wiring layer and a method of fabricating the metal wiring layer are provided. The method includes forming a dielectric layer on a substrate, forming a plurality of dielectric layer patterns and holes therein on the substrate by etching part of the dielectric layer, with a cross sectional area of the holes in the dielectric layer patterns decreasing with increasing distance away from the substrate and the holes exposing the substrate, forming a trench by etching a portion of the substrate exposed through the holes in the dielectric layer patterns, and forming a metal layer which fills the trench and the holes in the dielectric layer patterns. Thus, it is possible to prevent the occurrence of an edge build-up phenomenon by forming a metal layer in a plurality of holes in the dielectric layer patterns having a cross sectional area decreasing with increasing distance away from the substrate. Therefore, it is possible to prevent the transmittance of a liquid crystal layer from decreasing due to a failure to properly fill liquid crystal molecules in the liquid crystal layer, and thus to increase the quality of display.
Public/Granted literature
- US20090115066A1 Metal wiring layer and method of fabricating the same Public/Granted day:2009-05-07
Information query
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